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Íæż½ã½ã's metrology systems address a range of chip and substrate manufacturing applications, including verification of design manufacturability, new process characterization and high-volume manufacturing process monitoring. By providing precise measurement of pattern dimensions, film thicknesses, layer-to-layer alignment, pattern placement, surface topography and electro-optical properties, our comprehensive set of metrology systems, augmented by Al technology, allows chip manufacturers to maintain tight control of their processes for improved device performance and yield.<\/p>","link":"https:\/\/www.kla.com\/products\/chip-manufacturing\/metrology","name":"Metrology","slug":"metrology","taxonomy":"product_cat","parent":147,"meta":[],"acf":[],"yoast_head":"\nMetrology | Chip Manufacturing | Íæż½ã½ã<\/title>\n<meta name=\"description\" content=\"Íæż½ã½ã's comprehensive metrology portfolio includes Archer, ATL, SpectraShape, SpectraFilm, Aleris, WaferSight, Therma-Probe, RS-200 and Profilers.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" 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