{"id":152,"count":20,"description":"<p>Íæż½ã½ã\u2019s comprehensive portfolio of SensArray<sup>\u00ae<\/sup> products enables in situ monitoring of process tools\u2019 environments and wafer handling conditions. With wired and wireless sensor wafers and reticles, an automation package and data analysis systems, SensArray products provide comprehensive information for a wide range of wafer and reticle processes including wafer temperature and light measurement. They also support characterization of wafer handling and spinning chucks. 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