  {"id":251,"count":4,"description":"ÍæÅ¼½ã½ã offers a range of plasma etch and deposition process technologies for advanced packaging schemes - from High Density Fan-Out Wafer-Level Packaging (FOWLP) to the most advanced 3D packages where two or more die, potentially for different functions, are stacked and connected in the vertical direction with through-silicon vias (TSV) filled with metal. Leveraging decades of expertise in silicon etching, ÍæÅ¼½ã½ã also offers the most advanced plasma dicing solutions for dicing before grind (DBG) or dicing after grind (DAG) of wafers up to 300mm in diameter.\r\n\r\nOur production-proven processes and precise process control allow chip manufacturers to lower production costs and improve reliability, performance and multi-function integration.","link":"https:\/\/www.kla.com\/products\/packaging-manufacturing\/wafer-processing-systems-for-advanced-packaging","name":"Wafer Processing Systems for Advanced Packaging","slug":"wafer-processing-systems-for-advanced-packaging","taxonomy":"product_cat","parent":154,"meta":[],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.1.1 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Wafer Processing Systems for Advanced Packaging | ÍæÅ¼½ã½ã<\/title>\n<meta name=\"description\" content=\"SPTS Technologies provides plasma etch and deposition process solutions for advanced packaging applications to achieve performance and reliability goals.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.kla.com\/ko\/products\/packaging-manufacturing\/wafer-processing-systems-for-advanced-packaging\" \/>\n<meta property=\"og:locale\" content=\"ko_KR\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Wafer Processing Systems for Advanced Packaging | ÍæÅ¼½ã½ã\" \/>\n<meta property=\"og:description\" content=\"SPTS Technologies provides plasma etch and deposition process solutions for advanced packaging applications to achieve performance and reliability goals.\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.kla.com\/products\/packaging-manufacturing\/wafer-processing-systems-for-advanced-packaging\" \/>\n<meta property=\"og:site_name\" content=\"ÍæÅ¼½ã½ã\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:site\" content=\"@ÍæÅ¼½ã½ãcorp\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"CollectionPage\",\"@id\":\"https:\/\/www.kla.com\/products\/packaging-manufacturing\/wafer-processing-systems-for-advanced-packaging\",\"url\":\"https:\/\/www.kla.com\/products\/packaging-manufacturing\/wafer-processing-systems-for-advanced-packaging\",\"name\":\"Wafer Processing Systems for Advanced Packaging | ÍæÅ¼½ã½ã\",\"isPartOf\":{\"@id\":\"https:\/\/www.kla.com\/ko#website\"},\"description\":\"SPTS Technologies provides plasma etch and deposition process solutions for advanced packaging applications to achieve performance and reliability goals.\",\"breadcrumb\":{\"@id\":\"https:\/\/www.kla.com\/products\/packaging-manufacturing\/wafer-processing-systems-for-advanced-packaging#breadcrumb\"},\"inLanguage\":\"ko-KR\"},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.kla.com\/products\/packaging-manufacturing\/wafer-processing-systems-for-advanced-packaging#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/www.kla.com\/ko\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\ud328\ud0a4\uc9d5 \uc81c\uc870\",\"item\":\"https:\/\/www.kla.com\/ko\/products\/packaging-manufacturing\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"\ucca8\ub2e8 \ud328\ud0a4\uc9d5\uc744 \uc704\ud55c \uc6e8\uc774\ud37c \uacf5\uc815 \uc2dc\uc2a4\ud15c\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.kla.com\/ko#website\",\"url\":\"https:\/\/www.kla.com\/ko\",\"name\":\"ÍæÅ¼½ã½ã\",\"description\":\"Process Control and Yield Management\",\"publisher\":{\"@id\":\"https:\/\/www.kla.com\/ko#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.kla.com\/ko?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"ko-KR\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.kla.com\/ko#organization\",\"name\":\"ÍæÅ¼½ã½ã\",\"url\":\"https:\/\/www.kla.com\/ko\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"ko-KR\",\"@id\":\"https:\/\/www.kla.com\/ko#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.kla.com\/wp-content\/uploads\/kla-logo.png\",\"contentUrl\":\"https:\/\/www.kla.com\/wp-content\/uploads\/kla-logo.png\",\"width\":405,\"height\":90,\"caption\":\"ÍæÅ¼½ã½ã\"},\"image\":{\"@id\":\"https:\/\/www.kla.com\/ko#\/schema\/logo\/image\/\"},\"sameAs\":[\"https:\/\/www.facebook.com\/ÍæÅ¼½ã½ãcorp\/\",\"https:\/\/x.com\/ÍæÅ¼½ã½ãcorp\",\"https:\/\/www.linkedin.com\/company\/klacorp\/\"]}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"Wafer Processing Systems for Advanced Packaging | ÍæÅ¼½ã½ã","description":"SPTS Technologies provides plasma etch and deposition process solutions for advanced packaging applications to achieve performance and reliability goals.","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.kla.com\/ko\/products\/packaging-manufacturing\/wafer-processing-systems-for-advanced-packaging","og_locale":"ko_KR","og_type":"article","og_title":"Wafer Processing Systems for Advanced Packaging | ÍæÅ¼½ã½ã","og_description":"SPTS Technologies provides plasma etch and deposition process solutions for advanced packaging applications to achieve performance and reliability goals.","og_url":"https:\/\/www.kla.com\/products\/packaging-manufacturing\/wafer-processing-systems-for-advanced-packaging","og_site_name":"ÍæÅ¼½ã½ã","twitter_card":"summary_large_image","twitter_site":"@ÍæÅ¼½ã½ãcorp","schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"CollectionPage","@id":"https:\/\/www.kla.com\/products\/packaging-manufacturing\/wafer-processing-systems-for-advanced-packaging","url":"https:\/\/www.kla.com\/products\/packaging-manufacturing\/wafer-processing-systems-for-advanced-packaging","name":"Wafer Processing Systems for Advanced Packaging | ÍæÅ¼½ã½ã","isPartOf":{"@id":"https:\/\/www.kla.com\/ko#website"},"description":"SPTS Technologies provides plasma etch and deposition process solutions for advanced packaging applications to achieve performance and reliability goals.","breadcrumb":{"@id":"https:\/\/www.kla.com\/products\/packaging-manufacturing\/wafer-processing-systems-for-advanced-packaging#breadcrumb"},"inLanguage":"ko-KR"},{"@type":"BreadcrumbList","@id":"https:\/\/www.kla.com\/products\/packaging-manufacturing\/wafer-processing-systems-for-advanced-packaging#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/www.kla.com\/ko"},{"@type":"ListItem","position":2,"name":"\ud328\ud0a4\uc9d5 \uc81c\uc870","item":"https:\/\/www.kla.com\/ko\/products\/packaging-manufacturing"},{"@type":"ListItem","position":3,"name":"\ucca8\ub2e8 \ud328\ud0a4\uc9d5\uc744 \uc704\ud55c \uc6e8\uc774\ud37c \uacf5\uc815 \uc2dc\uc2a4\ud15c"}]},{"@type":"WebSite","@id":"https:\/\/www.kla.com\/ko#website","url":"https:\/\/www.kla.com\/ko","name":"ÍæÅ¼½ã½ã","description":"Process Control and Yield Management","publisher":{"@id":"https:\/\/www.kla.com\/ko#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.kla.com\/ko?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"ko-KR"},{"@type":"Organization","@id":"https:\/\/www.kla.com\/ko#organization","name":"ÍæÅ¼½ã½ã","url":"https:\/\/www.kla.com\/ko","logo":{"@type":"ImageObject","inLanguage":"ko-KR","@id":"https:\/\/www.kla.com\/ko#\/schema\/logo\/image\/","url":"https:\/\/www.kla.com\/wp-content\/uploads\/kla-logo.png","contentUrl":"https:\/\/www.kla.com\/wp-content\/uploads\/kla-logo.png","width":405,"height":90,"caption":"ÍæÅ¼½ã½ã"},"image":{"@id":"https:\/\/www.kla.com\/ko#\/schema\/logo\/image\/"},"sameAs":["https:\/\/www.facebook.com\/ÍæÅ¼½ã½ãcorp\/","https:\/\/x.com\/ÍæÅ¼½ã½ãcorp","https:\/\/www.linkedin.com\/company\/klacorp\/"]}]}},"_links":{"self":[{"href":"https:\/\/www.kla.com\/ko\/wp-json\/wp\/v2\/product_cat\/251","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.kla.com\/ko\/wp-json\/wp\/v2\/product_cat"}],"about":[{"href":"https:\/\/www.kla.com\/ko\/wp-json\/wp\/v2\/taxonomies\/product_cat"}],"up":[{"embeddable":true,"href":"https:\/\/www.kla.com\/ko\/wp-json\/wp\/v2\/product_cat\/154"}],"wp:post_type":[{"href":"https:\/\/www.kla.com\/ko\/wp-json\/wp\/v2\/product?product_cat=251"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}