{"id":1280,"count":9,"description":"Íæż½ã½ã\u2019s comprehensive portfolio of SensArray<sup>\u00ae<\/sup> products enables in situ monitoring of process tools\u2019 environments and wafer handling conditions. With wired and wireless sensor wafers, an automation package and data analysis systems, SensArray products provide comprehensive information, including wafer temperature, for a wide range of wafer processes. They also support characterization of wafer handling and spinning chucks. Semiconductor wafer manufacturers use SensArray data to visualize, diagnose and control process and wafer handling conditions.","link":"https:\/\/www.kla.com\/products\/wafer-manufacturing\/wafer-in-situ-process-management","name":"In Situ Process Management","slug":"wafer-in-situ-process-management","taxonomy":"product_cat","parent":213,"meta":[],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.1.1 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>In Situ Process Management | Wafer Manufacturing | Íæż½ã½ã<\/title>\n<meta name=\"description\" content=\"Explore Íæż½ã½ã\u2019s wafer in situ process management solutions, including SensArray\u00ae sensor wafers and automation packages for real\u2011time monitoring of temperature, handling and environmental conditions to support process development, tool qualification and yield improvement in wafer manufacturing\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing\/wafer-in-situ-process-management\" \/>\n<meta property=\"og:locale\" content=\"zh_CN\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"In Situ Process Management | Wafer Manufacturing | Íæż½ã½ã\" \/>\n<meta property=\"og:description\" content=\"Explore Íæż½ã½ã\u2019s wafer in situ process management solutions, including SensArray\u00ae sensor wafers and automation packages for real\u2011time monitoring of temperature, handling and environmental conditions to support process development, tool qualification and yield improvement in wafer manufacturing\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.kla.com\/products\/wafer-manufacturing\/wafer-in-situ-process-management\" \/>\n<meta property=\"og:site_name\" content=\"Íæż½ã½ã\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:site\" content=\"@Íæż½ã½ãcorp\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"CollectionPage\",\"@id\":\"https:\/\/www.kla.com\/products\/wafer-manufacturing\/wafer-in-situ-process-management\",\"url\":\"https:\/\/www.kla.com\/products\/wafer-manufacturing\/wafer-in-situ-process-management\",\"name\":\"In Situ Process Management | Wafer Manufacturing | Íæż½ã½ã\",\"isPartOf\":{\"@id\":\"https:\/\/www.kla.com\/zh-hans#website\"},\"description\":\"Explore Íæż½ã½ã\u2019s wafer in situ process management solutions, including SensArray\u00ae sensor wafers and automation packages for real\u2011time monitoring of temperature, handling and environmental conditions to support process development, tool qualification and yield improvement in wafer manufacturing\",\"breadcrumb\":{\"@id\":\"https:\/\/www.kla.com\/products\/wafer-manufacturing\/wafer-in-situ-process-management#breadcrumb\"},\"inLanguage\":\"zh-Hans\"},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.kla.com\/products\/wafer-manufacturing\/wafer-in-situ-process-management#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/www.kla.com\/zh-hans\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\u6676\u5706\u5236\u9020\",\"item\":\"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"\u539f\u4f4d\u5236\u7a0b\u7ba1\u7406\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.kla.com\/zh-hans#website\",\"url\":\"https:\/\/www.kla.com\/zh-hans\",\"name\":\"Íæż½ã½ã\",\"description\":\"Process Control and Yield Management\",\"publisher\":{\"@id\":\"https:\/\/www.kla.com\/zh-hans#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.kla.com\/zh-hans?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"zh-Hans\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.kla.com\/zh-hans#organization\",\"name\":\"Íæż½ã½ã\",\"url\":\"https:\/\/www.kla.com\/zh-hans\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"zh-Hans\",\"@id\":\"https:\/\/www.kla.com\/zh-hans#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.kla.com\/wp-content\/uploads\/kla-logo.png\",\"contentUrl\":\"https:\/\/www.kla.com\/wp-content\/uploads\/kla-logo.png\",\"width\":405,\"height\":90,\"caption\":\"Íæż½ã½ã\"},\"image\":{\"@id\":\"https:\/\/www.kla.com\/zh-hans#\/schema\/logo\/image\/\"},\"sameAs\":[\"https:\/\/www.facebook.com\/Íæż½ã½ãcorp\/\",\"https:\/\/x.com\/Íæż½ã½ãcorp\",\"https:\/\/www.linkedin.com\/company\/klacorp\/\"]}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"In Situ Process Management | Wafer Manufacturing | Íæż½ã½ã","description":"Explore Íæż½ã½ã\u2019s wafer in situ process management solutions, including SensArray\u00ae sensor wafers and automation packages for real\u2011time monitoring of temperature, handling and environmental conditions to support process development, tool qualification and yield improvement in wafer manufacturing","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing\/wafer-in-situ-process-management","og_locale":"zh_CN","og_type":"article","og_title":"In Situ Process Management | Wafer Manufacturing | Íæż½ã½ã","og_description":"Explore Íæż½ã½ã\u2019s wafer in situ process management solutions, including SensArray\u00ae sensor wafers and automation packages for real\u2011time monitoring of temperature, handling and environmental conditions to support process development, tool qualification and yield improvement in wafer manufacturing","og_url":"https:\/\/www.kla.com\/products\/wafer-manufacturing\/wafer-in-situ-process-management","og_site_name":"Íæż½ã½ã","twitter_card":"summary_large_image","twitter_site":"@Íæż½ã½ãcorp","schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"CollectionPage","@id":"https:\/\/www.kla.com\/products\/wafer-manufacturing\/wafer-in-situ-process-management","url":"https:\/\/www.kla.com\/products\/wafer-manufacturing\/wafer-in-situ-process-management","name":"In Situ Process Management | Wafer Manufacturing | Íæż½ã½ã","isPartOf":{"@id":"https:\/\/www.kla.com\/zh-hans#website"},"description":"Explore Íæż½ã½ã\u2019s wafer in situ process management solutions, including SensArray\u00ae sensor wafers and automation packages for real\u2011time monitoring of temperature, handling and environmental conditions to support process development, tool qualification and yield improvement in wafer manufacturing","breadcrumb":{"@id":"https:\/\/www.kla.com\/products\/wafer-manufacturing\/wafer-in-situ-process-management#breadcrumb"},"inLanguage":"zh-Hans"},{"@type":"BreadcrumbList","@id":"https:\/\/www.kla.com\/products\/wafer-manufacturing\/wafer-in-situ-process-management#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/www.kla.com\/zh-hans"},{"@type":"ListItem","position":2,"name":"\u6676\u5706\u5236\u9020","item":"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing"},{"@type":"ListItem","position":3,"name":"\u539f\u4f4d\u5236\u7a0b\u7ba1\u7406"}]},{"@type":"WebSite","@id":"https:\/\/www.kla.com\/zh-hans#website","url":"https:\/\/www.kla.com\/zh-hans","name":"Íæż½ã½ã","description":"Process Control and Yield Management","publisher":{"@id":"https:\/\/www.kla.com\/zh-hans#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.kla.com\/zh-hans?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"zh-Hans"},{"@type":"Organization","@id":"https:\/\/www.kla.com\/zh-hans#organization","name":"Íæż½ã½ã","url":"https:\/\/www.kla.com\/zh-hans","logo":{"@type":"ImageObject","inLanguage":"zh-Hans","@id":"https:\/\/www.kla.com\/zh-hans#\/schema\/logo\/image\/","url":"https:\/\/www.kla.com\/wp-content\/uploads\/kla-logo.png","contentUrl":"https:\/\/www.kla.com\/wp-content\/uploads\/kla-logo.png","width":405,"height":90,"caption":"Íæż½ã½ã"},"image":{"@id":"https:\/\/www.kla.com\/zh-hans#\/schema\/logo\/image\/"},"sameAs":["https:\/\/www.facebook.com\/Íæż½ã½ãcorp\/","https:\/\/x.com\/Íæż½ã½ãcorp","https:\/\/www.linkedin.com\/company\/klacorp\/"]}]}},"_links":{"self":[{"href":"https:\/\/www.kla.com\/zh-hans\/wp-json\/wp\/v2\/product_cat\/1280","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.kla.com\/zh-hans\/wp-json\/wp\/v2\/product_cat"}],"about":[{"href":"https:\/\/www.kla.com\/zh-hans\/wp-json\/wp\/v2\/taxonomies\/product_cat"}],"up":[{"embeddable":true,"href":"https:\/\/www.kla.com\/zh-hans\/wp-json\/wp\/v2\/product_cat\/213"}],"wp:post_type":[{"href":"https:\/\/www.kla.com\/zh-hans\/wp-json\/wp\/v2\/product?product_cat=1280"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}