{"id":1378,"count":9,"description":"Íæż½ã½ã \u5b8c\u6574\u7684 SensArray<sup>\u00ae<\/sup> \u4ea7\u54c1\u7ebf\u80fd\u539f\u4f4d\u76d1\u63a7\u5de5\u827a\u8bbe\u5907\u7684\u73af\u5883\u548c\u6676\u5706\u64cd\u4f5c\u6761\u4ef6\u3002 SensArray \u4ea7\u54c1\u914d\u5907\u6709\u7ebf\u548c\u65e0\u7ebf\u4f20\u611f\u6676\u5706\u3001\u81ea\u52a8\u5316\u5957\u4ef6\u548c\u6570\u636e\u5206\u6790\u7cfb\u7edf\uff0c\u53ef\u4e3a\u5404\u79cd\u6676\u5706\u5236\u7a0b\u63d0\u4f9b\u5305\u62ec\u6676\u5706\u6e29\u5ea6\u5728\u5185\u7684\u5168\u9762\u4fe1\u606f\u3002 \u5b83\u4eec\u8fd8\u652f\u6301\u8868\u5f81\u6676\u5706\u64cd\u4f5c\u548c\u65cb\u8f6c\u5361\u76d8\u7684\u7279\u6027\u3002 \u534a\u5bfc\u4f53\u6676\u5706\u5236\u9020\u5546\u4f7f\u7528 SensArray \u6570\u636e\u663e\u793a\u3001\u8bca\u65ad\u5e76\u63a7\u5236\u751f\u4ea7\u5de5\u827a\u548c\u6676\u5706\u64cd\u4f5c\u6761\u4ef6\u3002","link":"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing\/wafer-in-situ-process-management","name":"\u539f\u4f4d\u5236\u7a0b\u7ba1\u7406","slug":"wafer-in-situ-process-management","taxonomy":"product_cat","parent":214,"meta":[],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.1.1 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>\u539f\u4f4d\u5236\u7a0b\u7ba1\u7406 | Íæż½ã½ã<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing\/wafer-in-situ-process-management\" \/>\n<meta property=\"og:locale\" content=\"zh_CN\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u539f\u4f4d\u5236\u7a0b\u7ba1\u7406 | Íæż½ã½ã\" \/>\n<meta property=\"og:description\" content=\"Íæż½ã½ã \u5b8c\u6574\u7684 SensArray\u00ae \u4ea7\u54c1\u7ebf\u80fd\u539f\u4f4d\u76d1\u63a7\u5de5\u827a\u8bbe\u5907\u7684\u73af\u5883\u548c\u6676\u5706\u64cd\u4f5c\u6761\u4ef6\u3002 SensArray \u4ea7\u54c1\u914d\u5907\u6709\u7ebf\u548c\u65e0\u7ebf\u4f20\u611f\u6676\u5706\u3001\u81ea\u52a8\u5316\u5957\u4ef6\u548c\u6570\u636e\u5206\u6790\u7cfb\u7edf\uff0c\u53ef\u4e3a\u5404\u79cd\u6676\u5706\u5236\u7a0b\u63d0\u4f9b\u5305\u62ec\u6676\u5706\u6e29\u5ea6\u5728\u5185\u7684\u5168\u9762\u4fe1\u606f\u3002 \u5b83\u4eec\u8fd8\u652f\u6301\u8868\u5f81\u6676\u5706\u64cd\u4f5c\u548c\u65cb\u8f6c\u5361\u76d8\u7684\u7279\u6027\u3002 \u534a\u5bfc\u4f53\u6676\u5706\u5236\u9020\u5546\u4f7f\u7528 SensArray \u6570\u636e\u663e\u793a\u3001\u8bca\u65ad\u5e76\u63a7\u5236\u751f\u4ea7\u5de5\u827a\u548c\u6676\u5706\u64cd\u4f5c\u6761\u4ef6\u3002\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing\/wafer-in-situ-process-management\" \/>\n<meta property=\"og:site_name\" content=\"Íæż½ã½ã\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:site\" content=\"@Íæż½ã½ãcorp\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"CollectionPage\",\"@id\":\"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing\/wafer-in-situ-process-management\",\"url\":\"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing\/wafer-in-situ-process-management\",\"name\":\"\u539f\u4f4d\u5236\u7a0b\u7ba1\u7406 | Íæż½ã½ã\",\"isPartOf\":{\"@id\":\"https:\/\/www.kla.com\/zh-hans#website\"},\"breadcrumb\":{\"@id\":\"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing\/wafer-in-situ-process-management#breadcrumb\"},\"inLanguage\":\"zh-Hans\"},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing\/wafer-in-situ-process-management#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/www.kla.com\/zh-hans\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\u6676\u5706\u5236\u9020\",\"item\":\"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"\u539f\u4f4d\u5236\u7a0b\u7ba1\u7406\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.kla.com\/zh-hans#website\",\"url\":\"https:\/\/www.kla.com\/zh-hans\",\"name\":\"Íæż½ã½ã\",\"description\":\"Process Control and Yield Management\",\"publisher\":{\"@id\":\"https:\/\/www.kla.com\/zh-hans#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.kla.com\/zh-hans?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"zh-Hans\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.kla.com\/zh-hans#organization\",\"name\":\"Íæż½ã½ã\",\"url\":\"https:\/\/www.kla.com\/zh-hans\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"zh-Hans\",\"@id\":\"https:\/\/www.kla.com\/zh-hans#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.kla.com\/wp-content\/uploads\/kla-logo.png\",\"contentUrl\":\"https:\/\/www.kla.com\/wp-content\/uploads\/kla-logo.png\",\"width\":405,\"height\":90,\"caption\":\"Íæż½ã½ã\"},\"image\":{\"@id\":\"https:\/\/www.kla.com\/zh-hans#\/schema\/logo\/image\/\"},\"sameAs\":[\"https:\/\/www.facebook.com\/Íæż½ã½ãcorp\/\",\"https:\/\/x.com\/Íæż½ã½ãcorp\",\"https:\/\/www.linkedin.com\/company\/klacorp\/\"]}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"\u539f\u4f4d\u5236\u7a0b\u7ba1\u7406 | Íæż½ã½ã","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing\/wafer-in-situ-process-management","og_locale":"zh_CN","og_type":"article","og_title":"\u539f\u4f4d\u5236\u7a0b\u7ba1\u7406 | Íæż½ã½ã","og_description":"Íæż½ã½ã \u5b8c\u6574\u7684 SensArray\u00ae \u4ea7\u54c1\u7ebf\u80fd\u539f\u4f4d\u76d1\u63a7\u5de5\u827a\u8bbe\u5907\u7684\u73af\u5883\u548c\u6676\u5706\u64cd\u4f5c\u6761\u4ef6\u3002 SensArray \u4ea7\u54c1\u914d\u5907\u6709\u7ebf\u548c\u65e0\u7ebf\u4f20\u611f\u6676\u5706\u3001\u81ea\u52a8\u5316\u5957\u4ef6\u548c\u6570\u636e\u5206\u6790\u7cfb\u7edf\uff0c\u53ef\u4e3a\u5404\u79cd\u6676\u5706\u5236\u7a0b\u63d0\u4f9b\u5305\u62ec\u6676\u5706\u6e29\u5ea6\u5728\u5185\u7684\u5168\u9762\u4fe1\u606f\u3002 \u5b83\u4eec\u8fd8\u652f\u6301\u8868\u5f81\u6676\u5706\u64cd\u4f5c\u548c\u65cb\u8f6c\u5361\u76d8\u7684\u7279\u6027\u3002 \u534a\u5bfc\u4f53\u6676\u5706\u5236\u9020\u5546\u4f7f\u7528 SensArray \u6570\u636e\u663e\u793a\u3001\u8bca\u65ad\u5e76\u63a7\u5236\u751f\u4ea7\u5de5\u827a\u548c\u6676\u5706\u64cd\u4f5c\u6761\u4ef6\u3002","og_url":"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing\/wafer-in-situ-process-management","og_site_name":"Íæż½ã½ã","twitter_card":"summary_large_image","twitter_site":"@Íæż½ã½ãcorp","schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"CollectionPage","@id":"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing\/wafer-in-situ-process-management","url":"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing\/wafer-in-situ-process-management","name":"\u539f\u4f4d\u5236\u7a0b\u7ba1\u7406 | Íæż½ã½ã","isPartOf":{"@id":"https:\/\/www.kla.com\/zh-hans#website"},"breadcrumb":{"@id":"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing\/wafer-in-situ-process-management#breadcrumb"},"inLanguage":"zh-Hans"},{"@type":"BreadcrumbList","@id":"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing\/wafer-in-situ-process-management#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/www.kla.com\/zh-hans"},{"@type":"ListItem","position":2,"name":"\u6676\u5706\u5236\u9020","item":"https:\/\/www.kla.com\/zh-hans\/products\/wafer-manufacturing"},{"@type":"ListItem","position":3,"name":"\u539f\u4f4d\u5236\u7a0b\u7ba1\u7406"}]},{"@type":"WebSite","@id":"https:\/\/www.kla.com\/zh-hans#website","url":"https:\/\/www.kla.com\/zh-hans","name":"Íæż½ã½ã","description":"Process Control and Yield Management","publisher":{"@id":"https:\/\/www.kla.com\/zh-hans#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.kla.com\/zh-hans?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"zh-Hans"},{"@type":"Organization","@id":"https:\/\/www.kla.com\/zh-hans#organization","name":"Íæż½ã½ã","url":"https:\/\/www.kla.com\/zh-hans","logo":{"@type":"ImageObject","inLanguage":"zh-Hans","@id":"https:\/\/www.kla.com\/zh-hans#\/schema\/logo\/image\/","url":"https:\/\/www.kla.com\/wp-content\/uploads\/kla-logo.png","contentUrl":"https:\/\/www.kla.com\/wp-content\/uploads\/kla-logo.png","width":405,"height":90,"caption":"Íæż½ã½ã"},"image":{"@id":"https:\/\/www.kla.com\/zh-hans#\/schema\/logo\/image\/"},"sameAs":["https:\/\/www.facebook.com\/Íæż½ã½ãcorp\/","https:\/\/x.com\/Íæż½ã½ãcorp","https:\/\/www.linkedin.com\/company\/klacorp\/"]}]}},"_links":{"self":[{"href":"https:\/\/www.kla.com\/zh-hans\/wp-json\/wp\/v2\/product_cat\/1378","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.kla.com\/zh-hans\/wp-json\/wp\/v2\/product_cat"}],"about":[{"href":"https:\/\/www.kla.com\/zh-hans\/wp-json\/wp\/v2\/taxonomies\/product_cat"}],"up":[{"embeddable":true,"href":"https:\/\/www.kla.com\/zh-hans\/wp-json\/wp\/v2\/product_cat\/214"}],"wp:post_type":[{"href":"https:\/\/www.kla.com\/zh-hans\/wp-json\/wp\/v2\/product?product_cat=1378"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}