{"id":213,"count":18,"description":"Íæż½ã½ã\u2019s wafer manufacturing portfolio includes defect inspection and review, metrology, data management and in situ process monitoring systems that help manufacturers manage quality throughout the wafer fabrication process. Íæż½ã½ã's wafer manufacturing systems support process development, production monitoring and final quality check of a broad range of substrate types and sizes including silicon, prime silicon, SOI, sapphire, glass, GaAs, SiC, GaN, InP, GaSb, Ge, LiTaO<sub>3<\/sub>, LiNBO<sub>3<\/sub>, and epitaxial wafers. 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