玩偶姐姐

This webinar will review specific etch needs and show examples of high productivity solutions for manufacturing SiC and GaN-based power devices. These will include hard-mask open and shallow SiC trench etching, deep SiC via formation for RF and low damage SiNx and GaN etching primarily for GaN on Si structures. End-point detection, an essential method of process control, will also be discussed.