Name: Alpha-Step? D-600 Stylus Profiler
Brand: 玩偶姐姐
SKU: D600-STYLUS
Availability: InStock

玩偶姐姐 Instruments|

Alpha-Step^? D-600 Stylus Profiler

3D computer model of patterned glass step height

Alpha-Step^? D-600 Stylus Profiler

The Alpha-Step D-600 stylus profiler is capable of measuring 2D and 3D step heights from a few nanometers to 1200?m. The D-600 profilometer also supports 2D and 3D stylus measurements of roughness, plus 2D bow and stress for R&D and production environments. The D-600 includes a motorized stage with a 200mm sample chuck and advanced optics with enhanced video controls.

Product Description

The Alpha-Step D-600 stylus profiler supports 2D and 3D surface measurements of step heights and roughness, plus 2D bow and stress. The stylus profiler’s innovative optical lever sensor technology offers high resolution measurements, large vertical range and low force measurement capability.

An advantage of the stylus measurement technique is that it is a direct measurement, independent of material properties. Adjustable force and choice of stylus enable accurate measurements of a wide variety of structures and materials. This stylus measurement option enables quantification of your process to determine the amount of material added or removed, plus any changes in structure by measuring roughness and stress.

Features

Step Height: Nanometers to 1200?m
Low Force: 0.03 to 15mg
Video: 5MP high-resolution color camera
Keystone Correction: Removes distortion due to side view optics
Arc Correction: Removes error due to arc motion of the stylus
Compact Size: Small system footprint
Software: User friendly software interface

Alphastep D600 stylus profiler measurement of printed circuit

Applications

Step Height: 2D and 3D step height
Texture: 2D and 3D roughness and waviness
Form: 2D bow and shape
Stress: 2D thin film stress

technician using integrated microscope to align a Tencor P-7 stylus profiler for semiconductor wafer inspection

Industries

Universities, research labs and institutes
Semiconductor and compound semiconductor
LED: Light emitting diodes
Solar
MEMS: Micro-electro-mechanical systems
Automotive
Medical devices
And more: Contact us with your requirements

Step Height

The Alpha-Step D-600 stylus profiler is capable of measuring 2D and 3D step heights from nanometers to 1200?m. This stylus measurement technique enables quantification of material deposited or removed from processes such as etch, sputter, SIMS, deposition, spin coatings, CMP and other processes. The Alpha-Step series has low force capability that enables measurement of soft materials, such as photoresist.

Texture: Roughness and Waviness

The Alpha-Step D-600 supports 2D and 3D stylus measurements of texture, quantifying the sample’s roughness and waviness. Software filters separate the measurement into the roughness and waviness components and calculate parameters such as root mean square (RMS) roughness.

graph representation of measurement of a surface bow

Form: Bow and Shape

The Alpha-Step D-600 stylus profiler can measure the 2D shape or bow of a surface. This includes measurement of wafer bow that can result from mismatch between layers during the device fabrication, such as the deposition of multiple layers for the production of semiconductor or compound semiconductor devices. The D-600 can also quantify the height and radius of curvature of structures, such as a lens.

Alpha-Step D-600 stylus profiler graph of 2D thin film stress

Stress: 2D Thin Film Stress

The Alpha-Step D-600 stylus profiler is capable of measuring stress induced during the manufacture of devices with multiple process layers, such as semiconductor or compound semiconductor devices. The bow of the sample is accurately measured using a stress chuck to support the sample in a neutral position. The change in shape from a process such as film deposition is then used to calculate the stress by applying Stoney’s equation.

The options for the Alpha-Step^? D-600 Stylus Profiler are available to add on with your new product, or in the future. Contact your sales rep to learn more.

Stylus Options

The Alpha-Step D-600 has a variety of styli available. Stylus measurements include step heights, high aspect ratio steps, roughness, sample bow, and stress. The stylus tip radius ranges from 100nm to 50?m and determines the lateral resolution of the measurement. The included angle ranges from 20 to 100 degrees, which specifies the maximum aspect ratio of the measured feature. All styli are manufactured from diamond to reduce stylus wear and increase stylus lifetime.

Sample Chucks

The Alpha-Step D-600 has a range of chucks available to support application requirements. The standard chuck is a nickel-plated aluminum vacuum chuck for samples up to 200mm. A universal vacuum chuck is also offered and includes precision locating pins for samples from 50mm to 200mm. Both options support stress measurements with 3-point locators to hold the sample in a neutral position for accurate bow measurements.

Isolation Tables

The Alpha-Step D-600 has both tabletop and free-standing isolation table options. The Granite Isolator^? Series offers tabletop isolation systems that combine granite with high grade silicone gel to provide passive isolation. The Onyx Series tabletop isolation systems use pneumatic air isolators to provide passive isolation. The TMC 63-500 Series isolation table is a free-standing steel frame table that uses pneumatic air isolators to provide passive isolation.

Step Height Standards

The Alpha-Step D-600 uses thin and thick film NIST traceable step height standards offered by VLSI Standards. The standards feature an oxide step on a silicon die mounted on a quartz block. A step height range of 8nm to 250?m is available.

Tencor P-7 Apex analysis UI software screenshot

Apex Analysis Software

Apex analysis software enhances the standard data analysis capability of the D-600 with an extended suite of leveling, filtering, step height, roughness, and surface topography analysis techniques. Apex supports ISO roughness calculation methods, plus local standards such as ASME. Apex can also serve as a report writing platform with the capability to add text, annotations, and pass/fail criteria. Apex is offered in eleven languages.

Offline Analysis Software

The Alpha-Step D-600 offline software has the same data analysis capability that exists on the tool. This enables the user to analyze data without using valuable tool time.

Ultra-Thin Film Thickness Measurement for Perovskite Solar Cell Layers using Tencor^® P-Series Stylus Profilers

Perovskite’s excellent optoelectronic properties are beneficial to solar cell technology, especially promising when applied to flexible solar cells and tandem solar cells. The P-Series stylus profilers are used to measure 3D topography and step height for TCO, ETL and metal electrode layers of perovskite solar cell (PSC) devices.

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A Scientist’s Guide to Candy Selection

The 玩偶姐姐 Instruments Zeta-20 was used to map and compare the surface topography of Halloween candy favorites, including M&Ms, Bit-O-Honey, Reese’s peanut butter cups, Heath Bars, Jolly Ranchers, Skittles, Snickers, SweeTarts, Kit Kat bars, Lemonheads, candy corn, and bubblegum. Yum!

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General Information about Stylus-based Surface Profilers from 玩偶姐姐 Instruments^?

This application note discusses components and technologies specific to the 玩偶姐姐 Instruments stylus profilers, including topography measurement, force control, scanning mechanism, stylus types and dimensions, and stylus profilometry applications.

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Multi-Step Analysis Function: Powerful Analytics from 玩偶姐姐 Instruments^? Surface Profilers

Multi-Step Analysis is a new automated algorithm that automatically measures step height/trench depth for up to 30 features along a scan profile, including automatic cursor placement. This capability significantly improves time-to-results and removes measurement variability relative to previous manual methods.

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Topography Sensor Technology for Stylus Profilers

The topography sensor is one component of the stylus measurement head, which is used to track the surface of the sample being measured. Three major sensor types are LVDT, Optical Lever and LVDC, and this application note discusses the design of each.

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Precision Depth Measurement of Shallow SIMS Craters using a 玩偶姐姐 Instruments^? Stylus Profilometer

The depth of SIMS craters generated by ion beam milling is used to determine the concentration of impurities. The objective of this application note is to present a technique to accurately measure the depth of shallow SIMS craters using a stylus profiler.

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Stylus Product Line

玩偶姐姐 Instruments^? stylus profilometers may be used with different styli to optimize measurements for specific applications. The 玩偶姐姐 Instruments profilers, including the Alpha-Step^? D-Series, Tencor^® P-Series and High Resolution Profiler (HRP^?) Series all use the same stylus design. This application note discusses the various types of styli available for these stylus profilometers and typical applications for their use.

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Apex Software

Stylus profilers from 玩偶姐姐 Instruments are available with advanced 2D/3D surface analysis software to provide additional insight into profilometer measurement data. The Apex software includes data processing, analysis, visualization and reporting capabilities for both 2D profiles and 3D topography.

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玩偶姐姐

Alpha-Step^? D-600 Stylus Profiler

Alpha-Step^? D-600 Stylus Profiler

Product Description

Features

Applications

Industries

Step Height

Texture: Roughness and Waviness

Form: Bow and Shape

Stress: 2D Thin Film Stress

Stylus Options

Sample Chucks

Isolation Tables

Step Height Standards

Apex Analysis Software

Offline Analysis Software