Product Description
The Filmetrics? F60-c series extends the film thickness and index mapping capabilities of the F50 series by adding several features specifically designed for production environments. These include automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, and an industrial computer with pre-installed software.
The re-engineered F60-c improves upon the automation capability of the F60-c series by offering an automated cassette-to-cassette system for easy switching between wafer sizes. This system is ideal for incoming and outgoing process tool qualification, and chemical supplier quality control.
Product Features
- Industry-leading thin-film measurement technology
- Intuitive analysis software standard with every system
- Built-in online diagnostics
- Library with over 130 materials included with every system
- 24-hour (M-F) phone, email, and online support from highly trained application engineers
- System package includes integrated spectrometer/light source unit, TS-SiO2-8-8000 thickness standard, 6¡± and 200mm wafer reflectance standards, and more!
Applications
- Automated film-thickness measurement with a cassette-to-cassette system that can easily switch between wafer sizes
- Mapping of n & k
Industries
- Semiconductor
- Compound semiconductor
- Power devices
- MEMS and optical electronics
- Data storage
- 5G devices
Look at the Industries tab for additional details.
