Product Description
The Filmetrics? F60-t series extends the film thickness and index mapping capabilities of the F50 series by adding several features specifically designed for production environments. These include automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, and an industrial computer with pre-installed software.
Thin-film thickness and n&k are mapped quickly and easily with the F60-t advanced spectral reflectance system. The motorized R-theta stage moves automatically to selected measurement points and provides thickness measurements in seconds.
Product Features
- Industry-leading thin-film measurement technology
- Intuitive analysis software standard with every system
- Built-in online diagnostics
- Library with over 130 materials included with every system
- 24-hour (M-F) phone, email, and online support from highly trained application engineers
- System package includes integrated spectrometer/light source unit, TS-SiO2-4-7200 thickness standard, 4¡±, 6¡± and 200mm wafer reflectance standards, thickness standards and more!
Applications
- Automated film-thickness measurement
- Mapping of n & k
Industries
Semiconductor Fabrication
- Photoresist, oxides, nitrides, polysilicon, wafer backgrinding
LCDs
- Cell gaps, polyimide
Optical Coatings
- Hardcoat thickness, anti-reflection coating, filters
Look at the Industries tab for additional details.
